Surface metrology

Surface metrology is the measurement of small-scale features on surfaces, and is a branch of metrology. Surface primary form, surface fractality and surface roughness are the parameters most commonly associated with the field. It is important to many disciplines and is mostly known for the machining of precision parts and assemblies which contain mating surfaces or which must operate with high internal pressures.

Surface finish may be measured in two ways: contact and non-contact methods. Contact methods involve dragging a measurement stylus across the surface; these instruments are called profilometers. Non-contact methods include: interferometry, confocal microscopy, focus variation, structured light, electrical capacitance, electron microscopy, and photogrammetry.

The most common method is to use a diamond stylus profilometer. The stylus is run perpendicular to the lay of the surface. The probe usually traces along a straight line on a flat surface or in a circular arc around a cylindrical surface. The length of the path that it traces is called the measurement length. The wavelength of the lowest frequency filter that will be used to analyze the data is usually defined as the sampling length. Most standards recommend that the measurement length should be at least seven times longer than the sampling length, and according to the Nyquist–Shannon sampling theorem it should be at least two times longer than the wavelength of interesting features. The assessment length or evaluation length is the length of data that will be used for analysis. Commonly one sampling length is discarded from each end of the measurement length. 3D measurements can be made with a profilometer by scanning over a 2D area on the surface.

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