Multibeam Corporation
| Industry | Semiconductor industry |
|---|---|
| Founded | 2010 |
| Headquarters | Santa Clara, California |
|
Key people
|
David K. Lam (Chairman) |
| Products | E-beam lithography systems for the semiconductor industry |
| Website | http://www.multibeamcorp.com |
Multibeam is an American corporation that engages in the design of semiconductor processing equipment used in the fabrication of integrated circuits. Based in Santa Clara, in the Silicon Valley, Multibeam is led by Dr. David K. Lam, the founder and first CEO of Lam Research.
Multibeam developed miniature, all-electrostatic columns for e-beam lithography. Arrays of e-beam columns operate simultaneously and in parallel to increase wafer processing speed. With 36 patents filed, Multibeam develops multicolumn e-beam systems and platforms for four major applications: Complementary E-Beam Lithography (CEBL), Direct Electron Writing (DEW), Direct Deposition/Etch (DDE), and E-Beam Inspection (EBI)
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