Microelectromechanical system oscillator

Microelectromechanical system (MEMS) oscillators are timing devices that generate highly stable reference frequencies, which can measure time. These reference frequencies may be used to sequence electronic systems, manage data transfer, define radio frequencies, and measure elapsed time. The core technologies used in MEMS oscillators have been in development since the mid-1960s, but have only been sufficiently advanced for commercial applications since 2006. MEMS oscillators incorporate MEMS resonators, which are microelectromechanical structures that define stable frequencies. MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.

MEMS resonators are small electromechanical structures that vibrate at high frequencies. They are used for timing references, signal filtering, mass sensing, biological sensing, motion sensing, and other diverse applications. This article concerns their application in frequency and timing references.

For frequency and timing references, MEMS resonators are attached to electronic circuits, often called sustaining amplifiers, to drive them in continuous motion. In most cases these circuits are located near the resonators and in the same physical package. In addition to driving the resonators, these circuits produce output signals for downstream electronics.

By convention, the term oscillators usually denotes integrated circuits (ICs) that supply single output frequencies. MEMS oscillators include MEMS resonators, sustaining amps, and additional electronics to set or adjust their output frequencies. These circuits often include phase locked loops (PLLs) that produce selectable or programmable output frequencies from the upstream MEMS reference frequencies.

MEMS oscillators are commonly available as 4- or 6-pin ICs that conform to printed circuit board (PCB) solder footprints previously standardized for quartz crystal oscillators.

The term clock generator usually denotes a timing IC with multiple outputs. Following this custom, MEMS clock generators are multi-output MEMS timing devices. These are used to supply timing signals in complex electronic systems that require multiple frequencies or clock phases. For example, most computers require independent clocks for processor timing, disk I/O, serial I/O, video generation, Ethernet I/O, audio conversion, and other functions.

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