Mask set

A mask set or a photomask set is a series of electronic data that define geometry for the photolithography steps of semiconductor fabrication. Each of the physical masks generated from this data is called a photomask.

A mask set for a modern process typically contains as many as twenty or more masks, each of which defines a specific photolithographic step in the semiconductor fabrication process. Examples of masks include:

For more information, see photolithography and semiconductor manufacturing.

* Saint, Christopher and Judy. (2002). IC Layout Basics. McGraw-Hill.

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