Ion beam analysis

Ion beam analysis ("IBA") is an important family of modern analytical techniques involving the use of MeV ion beams to probe the composition and obtain elemental depth profiles in the near-surface layer of solids. All IBA methods are highly sensitive and allow the detection of elements in the sub-monolayer range. The depth resolution is typically in the range of a few nanometers to a few ten nanometers. Atomic depth resolution can be achieved, but requires special equipment. The analyzed depth ranges from a few ten nanometers to a few ten micrometers. IBA methods are always quantitative with an accuracy of a few percent. Channeling allows to determine the depth profile of damage in single crystals.

The quantitative evaluation of IBA methods requires the use of specialized simulation and data analysis software. SIMNRA and DataFurnace are popular programs for the analysis of RBS, ERD and NRA, while GUPIX is popular for PIXE. A review of IBA software was followed by an intercomparison of several codes dedicated to RBS, ERD and NRA, organized by the International Atomic Energy Agency.

IBA is an area of active research. The last major Nuclear Microbeam conference in Debrecen (Hungary) was published in NIMB 267(12-13).

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